Aeronex Announces Purifier Sale to International SEMATECH
February 25, 2002
Aeronex, Inc. recently announced the purchase by International SEMATECH of additional GateKeeper(R) inert gas purifiers for use in its 157 nanometer (nm) lithography process. The SS-500KF-I-4S and SS-35KF-I-4S purifiers will be used on International SEMATECH's Exitech Microstepper, the primary test bench for 157 nm photoresist development. The purifiers will remove moisture, oxygen and hydrocarbons from the nitrogen gas stream used to purge the optics within the tool. Optics purge gas purification serves to remove contaminants in the gas stream that otherwise would reduce light transmittance and damage optical components.
For additional information, call (800) 511-9761 or visit http://www.gaspurifier.com.