Materials Research Society: Silicon Carbide Literature
October 24, 2001
"Silicon Carbide-Materials, Processing and Devices," which contains 78 papers and 546 pages, documents symposium reports from the 2000 Materials Research Society (MRS) Fall Meeting. This volume focuses on new developments in the basic science of silicon carbide (SiC) materials, as well as rapidly maturing device technologies. Topics include SiC bulk growth, SiC epitaxy, SiO2/SiC interfaces, SiC devices, SiC materials, implantation/radiation damage, and metallization/characterization.