Morgan Advanced Ceramics: SiC Heater
November 28, 2001
Morgan Advanced Ceramics (MAC) recently introduced a new silicon carbide (SiC) heater. Ideal for semiconductor and electronics applications, the SiC heater is designed for use in process chambers where rapid heating to high temperature with low contamination is necessary. Fabricated from high purity chemical vapor deposition (CVD) silicon carbide, the heater offers high wear resistance in corrosive environments. The heater has a high thermal conductivity, excellent thermal shock resistance, a low outgassing rate and a low thermal mass.