JEOL: EPMA For Submicron Elemental Analysis
September 9, 2004
JEOL has introduced an advanced electron probe microanalyzer (EPMA) with a thermal field emission electron gun designed specifically for high-resolution, low-accelerating-voltage microanalysis and ultra-high resolution imaging of solid materials. A fully automated, high-throughput, versatile microprobe, the JXA-8500F can simultaneously use up to five wavelength dispersive X-ray spectrometers (WDS) and an energy dispersive X-ray spectrometer (EDS) for combined quantitative and qualitative element analysis of submicron sample areas. The JXA-8500F features a Schottky-type field emission gun, which produces a pinpoint probe diameter 1/2 to 1/10 the size of conventional probes -- as small as 40 nm (10 nA and 10 kV).
For more information, call (978) 535-5900 or visit http://www.jeol.com