Pfeiffer Vacuum: New Turbo Pumps
June 6, 2005
Pfeiffer Vacuum recently introduced reliable, high-capacity, high-throughput turbo pumps designed for high particulate processes in semiconductor, glass, industrial coating and R&D applications. These pumps feature a combination of pumping speeds from 1200 to 2100 l/s and throughput up to 2 standard liters per minute. The proven rotor/bearing design provides superior reliability with MTBF better than 200,000 hours, and the pumps are designed and tested to operate safely even after sudden stops. Designed for harsh duty applications with heavy particulate loads, Pfeiffer Vacuum's turbo pumps offer a combination of high pumping speed for light gases and high throughput for heavy gases.