Ceramic Industry News

SEMATECH Names Technologists to Head Lithography Division (posted 10/1/08)

SEMATECH recently announced that recognized technologists Bryan J. Rice, Ph.D., and Stefan Wurm, Ph.D., have been named director and associate director, respectively, of its Lithography Division. They will be responsible for assuring that SEMATECH’s strategic direction and its execution support critical lithography technology areas.

Rice, who most recently served as the immersion program manager, replaces Michael Lercel, who has returned to IBM from his SEMATECH assignment. Rice has been on assignment to SEMATECH from Intel Corp. since 2006. He has led SEMATECH’s high index immersion research in the search for high refractive index lens and immersion fluid materials. In addition, Rice has been instrumental in forming SEMATECH’s double exposure program, focusing on the exploration of novel materials for the litho-litho-etch patterning approach.

Rice holds a doctorate in nuclear physics from Duke University, as well as a bachelor’s degree in physics and a master’s degree in computer science from the Georgia Institute of Technology. He has made 11 U.S. patents and is the author of numerous publications on lithography and metrology.

Wurm, who most recently served as SEMATECH’s extreme ultraviolet (EUV) program manager, has led SEMATECH’s EUV strategy for more than four years. He has been instrumental in shaping and directing the SEMATECH EUV program, which provides worldwide EUV infrastructure capabilities and technology learning to SEMATECH members. He has more than 20 years of industry and R&D experience and has held positions in technology development at Siemens Semiconductors, Infineon and Qimonda. Wurm will be on assignment from Advanced Micro Devices, which he recently joined as a principal member of technical staff.

Wurm holds a doctorate in physics from the Technische Universität München, Germany. He has made more than 10 U.S. and non-U.S. patents and is the author of multiple publications covering lithography, fundamental research, semiconductor technology and manufacturing.

Visit www.sematech.org for more information.


Did you enjoy this article? Click here to subscribe to Ceramic Industry Magazine.

You must login or register in order to post a comment.



Image Galleries

November 2014 Issue Highlights

Our November 2014 issue is now available! Posted: March 31, 2015.


Ceramics Expo podcast
Editor Susan Sutton discusses the upcoming Ceramics Expo with event director Adam Moore.
More Podcasts

Ceramic Industry Magazine

CI April 2015 edition

2015 April

You'll want to check out our continuing coverage of the inaugural Ceramics Expo event, plus articles on dental ceramics, glass coatings, refractories, and more!

Table Of Contents Subscribe

Daily News

We know where you find the latest ceramic industry news (ahem), but where do you catch up on the rest of your daily news?
View Results Poll Archive


M:\General Shared\__AEC Store Katie Z\AEC Store\Images\Ceramics Industry\handbook of advanced ceramics.gif
Handbook of Advanced Ceramics Machining

Ceramics, with their unique properties and diverse applications, hold the potential to revolutionize many industries, including automotive and semiconductors.

More Products

Clear Seas Research

Clear Seas ResearchWith access to over one million professionals and more than 60 industry-specific publications,Clear Seas Research offers relevant insights from those who know your industry best. Let us customize a market research solution that exceeds your marketing goals.


facebook_40px twitter_40px  youtube_40pxlinkedin_40google+ icon 40px


CI Data Book July 2012

Ceramic Industry's Directories including Components, Equipment Digest, Services, Data Book & Buyers Guide, Materials Handbook and much more!