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CyberOptics Semiconductors: Gap-Measuring System

July 29, 2010
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The WaferSense Auto® Gapping System (AGS300) from CyberOptics Semiconductors, available in both 300 mm and 200 mm form factors, measures gaps that are critical to the outcome of semiconductor processes such as thin-film deposition, sputtering and etching. Consisting of three capacitive distance sensors, the wafer gapping system measures the gaps between shower heads and pedestals at three points that define a plane to ensure accurate and reproducible equipment setups. Using the AGS 300, engineers can better control gap uniformity and magnitude with high stability over time.

For more information, visit www.cyberopticssemi.com.

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