The WaferSense Auto® Gapping System (AGS300) from CyberOptics Semiconductors, available in both 300 mm and 200 mm form factors, measures gaps that are critical to the outcome of semiconductor processes such as thin-film deposition, sputtering and etching. Consisting of three capacitive distance sensors, the wafer gapping system measures the gaps between shower heads and pedestals at three points that define a plane to ensure accurate and reproducible equipment setups. Using the AGS 300, engineers can better control gap uniformity and magnitude with high stability over time.
Our annual R&D Lab Equipment and Instrumentation Directory helps you locate the best suppliers for your needs. This issue also includes articles focused on deformation and tension, materials characterization trends, non-destructive imaging, and more. Check it out!