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SEMATECH and Air Products Collaborate on Advanced Materials Development

July 17, 2013
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SEMATECH recently announced that Air Products has joined its Front End Processes (FEP) program and will work with SEMATECH to assess advanced materials and technologies for the development of sub-10 nm node III-V devices. Continued scaling will reportedly require the use of new materials and chemistries to keep pace with the International Technology Roadmap for Semiconductors (ITRS). For example, III-V channels offer significant power and performance benefits, such as higher mobility, enhanced drive current and supply voltage scaling, which enable continued device scaling and performance improvement.

As a member of this program, located at SUNY’s College of Nanoscale Science and Engineering (CNSE), Air Products will collaborate with SEMATECH’s engineers and leverage SEMATECH’s activities in advanced materials to enable better understanding of the underlying principles responsible for the deposition of III-V structures. The goal of this team will be to help guide the development of new chemical products that address a wide variety of needs for next generation semiconductor devices.

“Air Products will be cooperating with SEMATECH to accelerate the introduction of innovative products to the marketplace,” said John Langan, Ph.D., global director, Electronics Technology for Air Products. “By leveraging the capabilities of SEMATECH, we are accelerating new product development to fulfill the requests we are receiving for electronics materials from our industry partners.”

“SEMATECH is pleased to welcome Air Products as a partner,” said Paul Kirsch, director of SEMATECH’s FEP program. “Air Products’ long-standing and deep expertise in specialty materials will complement our own device and process expertise. We will work together to develop practical and promising manufacturable solutions to address the emerging needs of the advanced transistor markets.”

For additional information, visit www.airproducts.com or www.sematech.org.

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