- THE MAGAZINE
Bekaert VDS recently introduced its INV300 MF AC inverter module. The INV300 is used in dual-cathode sputtering employing a DC power supply to prevent anode contamination, particularly in reactive sputtering where dielectric materials are deposited. Alternating targets between cathode and anode cleans the surface, ensuring a stable deposition rate over long periods. The INV300 is water-cooled and has a small size so it can be integrated in existing equipment. It ensures a uniform coating over long periods and is easily adaptable on DC power supplies.