MoreEBARA Precision Machinery Europe has been named Supplier of the Year 2002 for OEM Components by Aixtron AG, a supplier of metal organic vapor deposition (MOCVD) systems. Among more than 500 participants, EBARA was selected for its outstanding performance in quality, delivery and customer support. EBARA's dry vacuum pumps are used for many applications in the semiconductor industry, including LPCVD, PECVD, MOCVD, PVD, etching, ion implantation and others.
For more information, call (49) 6181-187612, fax (49) 6181-187640 or e-mail gkiese@ebara-europe.com .
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