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ISSYS: NanoGetters

June 23, 2003
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Integrated Sensing Systems (ISSYS) announced the launch and commercialization of NanoGetters at Transducers 2003, recently held in Boston, Mass. NanoGetters provides greater vacuum gettering capability without the problems of particle and oxidation contamination encountered with traditional non-evaporable getters (NEGs). NanoGetters are targeted at high-performance MEMS vacuum packaging, bulk gas purification and solid-state vacuum pumps. NanoGetters are tested and ideally suited for MEMS vacuum packaging, solid-state vacuum pumps, gas purification, vacuum displays, semiconductor equipment and scientific vacuum systems.

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