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“The outstanding thermal uniformity, high ramp rate and high temperature operation of the Momentive PBN heaters are fundamentally important to the performance of our new Ci tool,” said Kurt Flechsig, president and chief executive officer of KDF. “The ability of the Momentive engineering team to deliver its industry-leading technology on time and on budget will give our new Ci tool significant advantages in the marketplace.”
According to Ray Kolberg, president of Momentive Quartz and Ceramics, “KDF’s selection of Momentive ceramic heaters is a testament to the design and engineering expertise we deliver to the semiconductor industry.”
Momentive’s PBN heaters and electrostatic chucks (e-chucks) combine the electrical, chemical, and thermal properties of PBN (a dielectric material) with pyrolytic graphite (an electrical conductor). The Momentive PBN heaters feature a high temperature capability exceeding 1500ºC, ramp rates up to 600ºC/min and thermal uniformity greater than 99%.
For more information, call (800) 822-4322 or (440) 878-5700, or visit www.momentive.com. KDF’s website is located at www.kdf.com.