Ceramic Industry

Bekaert VDS: New MF AC Inverter Module

May 7, 2003
Bekaert VDS recently introduced its INV300 MF AC inverter module,used in dual-cathode sputtering employing a DC power supply to prevent anode contamination, particularly in reactive sputtering where dielectric materials are deposited.

Bekaert VDS recently introduced its INV300 MF AC inverter module. The INV300 is used in dual-cathode sputtering employing a DC power supply to prevent anode contamination, particularly in reactive sputtering where dielectric materials are deposited. Alternating targets between cathode and anode cleans the surface, ensuring a stable deposition rate over long periods. The INV300 is water-cooled and has a small size so it can be integrated in existing equipment. It ensures a uniform coating over long periods and is easily adaptable on DC power supplies.

For more information, call (32) 9381-6161, fax (32) 9380-0667, e-mail Koen.Staelens@bekaert.com or visit http://www.bekaert.com/bac .