CoorsTek, Inc. recently announced the commercialization of state-of-
the-art automation technology. Acquired via a licensing arrangement
with a California-based engineering firm, CoorsTek has begun volume
manufacturing of automatic door openers (ADOs) -- devices that
automatically open and close an industry-standard, 300-millimeter
wafer pod. This cutting-edge technology is applicable to most front-
end semiconductor chip manufacturing processes and notably, to the
new generation, 300-millimeter tools. Two key attributes reportedly
distinguish the ADO technology: compatibility with a variety of
sensor technologies and use of electrical servo drives versus
conventional pneumatic devices. These features reportedly enhance
reliability, accuracy and repeatability.
For additional information, visit http://www.coorstek.com.