Ceramic Industry

MKS: New Residual Gas Analyzer

December 9, 2003

MKS Instruments, Inc. recently announced the availability of its e-Vision(TM) residual gas analyzer (RGA), the first commercially available web-enabled RGA. The small footprint e-Vision RGA is the first with an integrated Ethernet interface and embedded web server, enabling operation over any TCP/IP network, including the Internet. Going beyond traditional networking and eliminating the need for dedicated computers, the system operator can control the e-Vision RGA, monitor the vacuum environment, see relevant data, and make operating decisions from any physical location and from any computer with web access. The analyzer provides low-cost control for vacuum troubleshooting, system status checks, leak detection and baseline chamber gas monitoring in a wide range of vacuum applications at pressures up to 10-4 Torr, all via a secured network.

The company's website is located at http://www.mksinst.com .