Veeco Instruments: Atomic Force Microscope
August 12, 2003
Veeco Instruments Inc. has introduced another member of its automated atomic force microscope (AFM) family specifically designed to address the semiconductor industry's need for higher-resolution etch depth metrology at smaller feature sizes. The new Dimension X(TM) automated AFM enables chipmakers to measure etch-related structures that are 90 nm and below using a technique that is widely known for its ability to provide exceptional resolution of device features without damaging the wafer.
For more information, visit http://www.veeco.com .