SEMI(R) has published 25 new technical standards applicable to the semiconductor and flat panel display manufacturing industries. The new standards, developed by technical experts from equipment suppliers, device manufacturers and other companies participating in the SEMI International Standards Program, are available for purchase in CD-ROM format or can be downloaded from the SEMI website at http://www.semi.org
. SEMI Standards are published three times a year. Included in the new standards are guidelines for defining the quality area of an LCD mask, formats for data management in the semiconductor exposure process, and specifications for polished monocrystalline silicon carbide wafers.