Aeronex(R) has announced the availability of gas purifier retrofit packages for gallium nitride (GaN) and gallium arsenide (GaAs) MOCVD tools used in the manufacture of compound semiconductor devices, LEDs and optoelectronics. These retrofit packages allow tool users to upgrade the performance of their MOCVD tool without modifying existing plumbing. The Aeronex purifiers that comprise the retrofit packages drop in and exactly replace the existing purifiers. The GaN tool purifier package purifies the nitrogen, hydrogen and ammonia gases required by the major GaN tools, while the GaAs tool purifier purifies the nitrogen, hydrogen, phosphine and arsine gases required by the major GaAs tools.

For more information, call (858) 452-0124, fax (858) 452-0229 or gatekeeper@aeronex.com.