MKS INSTRUMENTS: Controller Software
MKS Instruments, Inc. will introduce and demonstrate Controls Workbench (CWB) software at Semicon West, which will be held June 12-14 in San Francisco. CWB reportedly provides a single interface for controlling, tuning, monitoring, and configuring multiple MKS controllers, including the MKS Automation Platform and the MultiTherm product family. CWB leverages multivariate analytics for advanced auto tuning that improves process performance compared to existing tuning approaches. Ideal for vacuum and temperature control applications, CWB features user customizable dashboards that allow for easy process visualization and remote process control.
When used with MultiTherm products, the software provides support for advanced options that reportedly include model-based temperature control, cascading loops and PID gain scheduling. It communicates to MKS devices using Modbus TCP/IP, enabling Ethernet communication to all compatible devices, while enabling custom visualizations with device specific views and charts for individual processes or across an entire plant or fab. Controls Workbench software offers built-in data logging, charting, and data exporting; advanced process diagnostic capabilities; incorporation of PLC and IEC 61131-3 projects and recipes; and the ability to remotely activate, pause or stop process routines.