Pushing the ALD Envelope Jill S. Becker Ritwik Bhatia Mark J. Dalberth Eric W. Deguns Guo Liu Mark J. Sowa Ganesh M. Sundaram May 1, 2010 No Comments ALD enables films of a range of materials to be grown on substrates of just about any material and topography with digital layer-by-layer thickness control.Read More